Low-Cost, Open-Source XYZ Nanopositioner for High-Precision Analytical Applications
Technical University of Denmark mail
We present a design of an open-source XYZ-axis nanopositioning system that provides sub-nanometer resolution, a payload capacity of up to 12 kg (horizontal), compact size, low cost, and easy assembly; furthermore, the system is adjustment-free. Furthermore, we present 11 variations of the nanopositioner designs that are either compatible with ultra-high-vacuum systems and other existing systems, 3D printable, or hacking commercial linear slides.
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